Total Induced Dose Characterization of Power MOSFETs **BUY15CS23K**

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IRRADIATION TEST REPORT: 1228TR10 Total Induced Dose Characterization of Power MOSFETs **BUY15CS23K** Dr. Martin Göllner Dr. Bernd Eisener IFAG PMM RFS D HIR IFAG PMM RFS D HIR Table of Contents 1 SCOPE 2 2 IRRADIATION FACILITY 2 3 EXPERIMENTAL DETAILS 3 3.1 Sample Placement and Sample Size 3 3.2 Irradiation Conditions 3 3.3 Pre- and Post-Irradiation Tests 3 4 RADIATION EXPOSURE AND TEST SEQUENCE 4 5 TEST RESULTS 4 6 SUMMARY 6 1

1. SCOPE This Test Report describes Total Induced Dose (TID) tests and results of radiation-hardened power MOSFETs from Infineon Technologies, types BUY15CS23K, in accordance to ESCC Basic Spec 22900. Tests have been performed at the facilities Gammacell 1 and Gammacell 2 of Helmholtz-Center, Department of Radiation Sciences, Munich-Neuherberg, Germany, week 48, 2015. 2 IRRADIATION FACILITIES The Co60 Source GAMMACELL 2 is a facility at the Helmholtz-Centre, Department of Radiation Sciences, Munich-Neuherberg, Germany. Dose rate varies by +/-15 % within the irradiation chamber. However, sample placement is such that position-dependent dose rate variation is from 95 % to 100 %, therefore, stays within +/-5 % of nominal (fig. 4) 1 2 3 4 Fig. 1: Gamma intensity within Co60 irradiation chamber. Samples are positioned in levels 1-4 at defined locations. 2

3 EXPERIMENTAL DETAILS 3.1 Sample Placement and Sample Size Tab. 1 shows the individual placement of the devices. Refer to fig. 4 for details of radiation exposure in Positions 1-8. The dies are mounted on a PCB. 3.2 Irradiation Conditions Dose rate: 280 Gy/h (Nov 2015, see note 1) TID: >1000 Gy on all parts (see note 2) Bias: C1: UGS= +20 V; UDS = 0 V C2: UGS= - 20 V; UDS = 0 V C3: UGS= 0 V; UDS = +150 V Notes: 1. Dose rate performance of the source is updated monthly and recorded in the test report. 2. Position-dependence of dose rate is accounted for to achieve target dose on all parts. 3.3 Pre- and Post-Irradiation Tests The following parameters will be measured for test sample type BUY15CS23K: IDSS(120 V), IGSS(+/-20 V), RDSON(15 A, Ugs=10 V), VSD(23 A), Vgs(th)(1 ma), BVDSS (0.25 ma). 3

4. RADIATION EXPOSURE AND TEST SEQUENCE Irradiation- anneal- and characterization steps according to the FLOW CHART FOR QUALIFICATION TESTING of Basic Specifications ESCC22900. 1. Sample serialization 2. Electrical pre-test according to 3.3.. 3. Irradiation with a dose rate of 280 Gy/h for a dose of >1000Gy, in one irradiation step, 4. Transport of samples, cooled to -23 C from irradiation site to electrical characterization site. 5. Parameter measurements according to 3.3. 6. Room temperature anneal for 24 hours under same bias conditions as during TID, followed by parameter measurements according to 3.3. 7. Accelerated aging under same bias conditions as during TID: 168 hours at 100 C. 8. Electrical post-rad/post anneal test, according to 3.3. 5. TEST RESULTS In the following, each of the electrically parameters listed in 3.3 is plotted for four points of the testing sequence (see Fig.2), i.e. 1. Prior to irradiation (pre-rad) 2. Post-irradiation (post-rad 1000Gy) 3. Posterior to room-temperature anneal of 24 hours under same bias conditions as during TID (anneal 24h) 4. Posterior to 168 hours of anneal at 100 C under same bias conditions as during TID (anneal 168h) Due to the introduction of a new test setup, no unirradiated control (reference) were available to be measured. However, as all devices passed and behave as expected, no comparison to reference devices is necessary to confirm TID hardness. Three groups of graphs are given coded by line-color (see Table 1): 1. C1: UGS= +20 V; UDS = 0 V (black) 2. C2: UGS= - 20 V; UDS = 0 V (green) 3. C3: UGS= 0 V; UDS = +150 V (red) 4

17:VSD23A [V] 10:IDSS80% [ua] 17:Ron15A [mohm] 6:IGSS-20 [na] 9:BVDSS [V] 2:VGSTH [V] 5:IGSS20 [pa] Total Induced Dose Test on Infineon Rad-Hard MOSFETs Type BUY15CS23K BUY15CS23K / L5462A / PCB 600 3.2 500 3.0 400 2.8 300 200 2.6 100 2.4 0 1.1 175 0.9 170 0.7 165 0.5 0.3 160 0.1 155 100.0 55 10.0 54 53 1.0 52 0.1 51 0.01 50 1.11 1.1 1.09 1.08 Radio Frequency & Sensors 1544AJPx L5462 2016-01-13 -D1- IFAG PMM RFS D HIR Fig. 2: Plot of TID test results for BUY15CS23K 5

6. SUMMARY SN FE Wafer Lot Wafer Bias Condition VGS VDS Level Intensitiy [%] Result 1544AJ#103 VE540534 03 C1 +20 0 2 95-100 pass 1544AJ#104 VE540534 03 C2-20 0 3 95-100 pass 1544AJ#105 VE540534 03 C3 0 150 1 95-100 pass 1544AJ#106 VE540534 03 C1 +20 0 2 95-100 pass 1544AJ#107 VE540534 03 C2-20 0 3 95-100 pass 1544AJ#108 VE540534 03 C3 0 150 1 95-100 pass 1544AJ#151 VE532625 03 C1 +20 0 2 95-100 pass 1544AJ#152 VE532625 03 C1 +20 0 2 95-100 pass 1544AJ#153 VE532625 03 C2-20 0 3 95-100 pass 1544AJ#154 VE532625 03 C3 0 150 1 95-100 pass 1544AJ#155 VE532625 03 C1 +20 0 2 95-100 pass 1544AJ#156 VE532625 03 C1 +20 0 2 95-100 pass 1544AJ#157 VE532625 03 C2-20 0 3 95-100 pass 1544AJ#158 VE532625 03 C3 0 150 1 95-100 pass 1544AJ#159 VE532625 08 C1 +20 0 2 95-100 pass 1544AJ#160 VE532625 08 C1 +20 0 2 95-100 pass 1544AJ#161 VE532625 08 C2-20 0 3 95-100 pass 1544AJ#162 VE532625 08 C3 0 150 1 95-100 pass 1544AJ#163 VE532625 08 C1 +20 0 2 95-100 pass 1544AJ#164 VE532625 08 C1 +20 0 2 95-100 pass 1544AJ#165 VE532625 08 C2-20 0 3 95-100 pass 1544AJ#166 VE532625 08 C3 0 150 1 95-100 pass 1544AJ#167 VE532625 11 C1 +20 0 3 95-100 pass 1544AJ#168 VE532625 11 C2-20 0 3 95-100 pass 1544AJ#169 VE532625 11 C3 0 150 1 95-100 pass 1544AJ#170 VE532625 11 C1 +20 0 3 95-100 pass 1544AJ#171 VE532625 11 C2-20 0 3 95-100 pass 1544AJ#172 VE532625 11 C3 0 150 1 95-100 pass 1544AJ#173 VE532625 13 C1 +20 0 3 95-100 pass 1544AJ#174 VE532625 13 C2-20 0 3 95-100 pass 1544AJ#175 VE532625 13 C3 0 150 1 95-100 pass 1544AJ#176 VE532625 13 C1 +20 0 3 95-100 pass 1544AJ#177 VE532625 13 C2-20 0 3 95-100 pass 1544AJ#178 VE532625 13 C3 0 150 1 95-100 pass Table 1: List of irradiated Devices 6